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Application
- Continuous monitoring of semiconductor processing gas and liquid crystal factories
Features
- Digital display (LED) for gas concentration readout
- Calibration and other sensor information stored in sensor memory
- Global Standard Networks (DeviceNet, LonWorks, and CC-Link) available as options
- Self-diagnosis by microprocessor
- Reduced running costs
Gases Detected
- Semiconductor processing gas and toxic gas
- Arsine, silane, disilane, phosphine, germane, diborane, hydrogen selenide, etc.
Application
- For transportable continuous measurement
Features
- Clear easy-to-read digital display for gas concentration readout
- Calibration and other sensor information stored in sensor memory
- Self-diagnosis by microprocessor
- Various communication functions
- Easy replacement of sensor and pump
Gases Detected
- Semiconductor processing gas and toxic gas
- Arsine, silane, disilane, phosphine, germane, diborane, hydrogen selenide, etc.
HIGH SENSITIVITY C5F8/C4F6 GAS MONITOR SPECIAL PYROLYZER + PHOTOELECTRIC PHOTOMETRY METHOD
MODEL FP-260AGZS
For Continuous Measurement
<BUILT IN SPECIAL PYROLYZER>
Application
- Environmental monitoring (e.g., semiconductor fabs)
- Detection of uncaptured gas from scrubbers
Features
- C5F8/C4F6 low-concentration/low-density gas detection
- Portable and easily installed
- Easily replaceable plug-in tape casette
Gases Detected
- C5F8 (Octafluorocyclopentene)
- C4F6 (Perfluorobutadiene)
HIGH SENSITIVITY TOXIC GAS MONITOR
MODEL FP-300
Photoelectric photometry method using detection tape casette
Application
- Environmental monitoring (e.g., semiconductor fabs)
- Detection of uncaptured gas from scrubbers
Features
- Highly sensitive; ideal for low gas concentrations (ppb detection)
- Easy detection tape replacement with plug-in cassette
- Tape remainder display and tape-end warning alarm
- Compact, lightweight, and portable
- Simple operation
Gases Detected
- Semiconductor processing gas and toxic gas
- Arsine, silane, disilane, phosphine, ammonia, hydrogen sulfide, chlorine, phosgene, etc.
Application
- Detection of toxic gas leakages in petroleum refineries and petrochemical and chemical factories
Features
- Intrinsically safe explosion-proof operation for target products
- Works with various types of gases (by adjusting the sensor line-up)
- Application of long lasting constant-potential electrode sensors
Gases Detected
- Semiconductor processing gas and toxic gas
- Arsine, silane, disilane, phosphine, ammonia, chlorine, phosgene, carbon conoxide, etc
Application
- Spot measurement of toxic gases
Features
- Automatic adjustment and self-diagnosis functions
- Easy to use
- Peak hold and averaged readout
Gases Detected
- Semiconductor processing gas and toxic gas
- Arsine, silane, disilane, phosphine, germane, diborane, hydrogen selenide, etc.
